Determination of angle resolved velocity distributions of sputtered tungsten atoms

被引：30
|
作者：
Goehlich, A [1 ]
Niemöller, N [1 ]
Döbele, HF [1 ]
机构：
[1] Univ Essen Gesamthsch, Inst Laser & Plasmaphys, D-45117 Essen, Germany
来源：
JOURNAL OF NUCLEAR MATERIALS | 1999年 / 266卷
关键词：
sputtering; tungsten; laser-induced fluorescence; TRIM simulation;
D O I：
10.1016/S0022-3115(98)00830-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Angle resolved velocity distributions of tungsten atoms sputtered by bombardment of argon ions in the energy range between 0.2 and 5 keV are reported. The velocity distribution is determined using Doppler-shifted laser induced fluorescence spectroscopy (DSLF) in connection with a detection geometry which allows to vary the angle of emission independently of the angle of incidence. Deviations from the limiting isotropic case (Thompson distribution) are observed. Experimental velocity distributions are compared with TRIM.SP simulations. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：501 / 506
页数：6
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