Grinding characteristics of large reflective mirrors by large ultraprecision aspheric optics ELID-grinder for integrated and computerized fabrication system

被引：0
|
作者：
Ohmori, H [1 ]
Lin, W [1 ]
Yamagata, Y [1 ]
Moriyasu, S [1 ]
Makinouchi, A [1 ]
Morita, S [1 ]
机构：
[1] RIKEN, Inst Phys & Chem Res, Tokyo 1730003, Japan
来源：
PROGRESS OF MACHINING TECHNOLOGY: WITH SOME TOPICS IN ADVANCED MANUFACTURING TECHNOLOGY | 2000年
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D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A large ultraprecision aspheric grinding system with ELID (Electrolytic In-Process Dressing) has been developed for the fabrication of large optical elements and components, which can be used in Synchrotron radiation facilities and X-ray mirror. In this study, fused silica glass which is used for X-ray mirror materials was ground with the grinding system by ELID-grinding using #325, #1200 and #4000 cast iron-cobalt hybrid bonded diamond wheels, and the grinding characteristics of this X-ray mirror were investigated. The results, very good ground surface of Pa 31nm and Ry 274nm of 500mm mirror can be achieved.
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页码：375 / 380
页数：6
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