Electron neutral collision frequency measurement with the hairpin resonator probe

被引：14
|
作者：
Peterson, David J. [1 ]
Kraus, Philip [2 ]
Chua, Thai Cheng [2 ]
Larson, Lynda [3 ]
Shannon, Steven C. [1 ]
机构：
[1] North Carolina State Univ, Dept Nucl Engn, Raleigh, NC 27695 USA
[2] Appl Mat Inc, Sunnyvale, CA USA
[3] Treasure Isle Jewelers, Cary, NC USA
来源：
PLASMA SOURCES SCIENCE & TECHNOLOGY | 2017年 / 26卷 / 09期
关键词：
hairpin resonator; collision frequency; plasma diagnostic; DENSITY; CONDUCTIVITY; EQUATION;
D O I：
10.1088/1361-6595/aa80fa
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
Electron neutral collision frequency is measured using both grounded and floating hairpin resonator probes in a 27 MHz parallel plate capacitively coupled plasma. Operating conditions are 0.1-2 Torr (13.3-267 Pa) in Ar, He, and Ar-He gas mixtures. The method treats the hairpin probe as a two wire transmission line immersed in a dielectric medium. Measurements are obtained using a pressure and sheath correction process by sweeping over assumed collision frequencies in order to obtain the measured collision frequency. Results are compared to hybrid plasma equipment module simulations and show good agreement.
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收藏
页数：8
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