Study of Raman Spectra of Nano-crystalline Diamond Like Carbon (DLC) films Composition (sp2:sp3) with Substrate Temperature

被引：0

作者：

Yadav, Vikram S. ^{[1
]}

Sahu, Devendra K. ^{[1
]}

Singh, Manveer ^{[1
]}

Kumar, Kuldeep ^{[1
]}

机构：

[1] Bundelkhand Inst Engn & Technol, Dept Appl Sci, Jhansi 284128, Uttar Pradesh, India

来源：

WCECS 2009: WORLD CONGRESS ON ENGINEERING AND COMPUTER SCIENCE, VOLS I AND II | 2009年

关键词：

Raman Spectra; Substrate Temperature; DLC characterization etc; AMORPHOUS-CARBON; DEPOSITION; SPECTROSCOPY; GRAPHITE;

D O I：

暂无

中图分类号：

TP301 [理论、方法];

学科分类号：

081202 ;

摘要：

Nano-crystalline Diamond like Carbon (DLC) film has been grown by Dense Plasma Focusing Method (DPF) using pure graphite Plasma, on different substrate (glass/silica) at different substrate temperature. The films were grown at substrate temperature 100 degrees C, 150 degrees C & 300 degrees C by the high dense plasma of energy 1.3 k Joule on glass and silica. Raman spectra confirmed that sp(3) content in grown in the films under various conditions. The Raman spectra of these films show a broad asymmetric peak which narrow with decreasing sp(2) contents. We believe that our data presented here may be used as reference of DLC characterization. http://www.iaeng.org/publication/WCECS2009/WCECS2009_pp78-81.pdf

引用

页码：78 / +

页数：2

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