Discharge dynamics of pin-to-plate dielectric barrier discharge at atmospheric pressure

被引:20
|
作者
Sun, Liqun [1 ]
Huang, Xiaojiang [1 ]
Zhang, Jie [1 ,2 ]
Zhang, Jing [1 ,2 ]
Shi, J. J. [1 ,2 ]
机构
[1] Donghua Univ, Coll Sci, Shanghai 201620, Peoples R China
[2] Donghua Univ, Coll Mat Sci & Engn, State Key Lab Modificat Chem Fibers & Polymer Mat, Shanghai 201620, Peoples R China
关键词
GLOW-DISCHARGE;
D O I
10.1063/1.3514136
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The discharge dynamics of pin-to-plate dielectric barrier discharge was studied in atmospheric helium at 20 kHz The discharge was predominately ignited in positive half cycle of applied voltage with sinusoidal waveform The temporal evolution of the discharge was investigated vertically along the discharge gap and radically on the dielectric surface by time resolved imaging It is found that a discharge column with a diameter of 2 mm was ignited above the pin electrode and expanded toward a plate electrode On the dielectric surface with space charge accumulation, plasma disk in terms of plasma ring was formed with radius up to 25 mm The expansion velocity of plasma ring can reach a hypersonic speed of 3 0 km/s The ionization wave due to electron diffusion is considered to be the mechanism for plasma ring formation and dynamics (C) 2010 American Institute of Physics [doi 10 1063/1 3514136]
引用
收藏
页数:4
相关论文
共 50 条
  • [1] Atmospheric pressure remote plasma ashing of photoresist using pin-to-plate dielectric barrier discharge
    Park, Jaebeom
    Kyung, Sejin
    Yeom, Geunyoung
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2007, 46 (36-40): : L942 - L944
  • [2] Atmospheric pressure remote plasma ashing of photoresist using pin-to-plate dielectric barrier discharge
    Park, Jaebeom
    Kyung, Sejin
    Yeom, Geunyoung
    Japanese Journal of Applied Physics, Part 2: Letters, 2007, 46 (36-40):
  • [3] Characteristics of a pin-to-plate dielectric barrier discharge in helium
    Lee, YH
    Yeom, GY
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2005, 47 (01) : 74 - 78
  • [4] Measurement of ion density in an atmospheric pressure argon with pin-to-plate dielectric barrier discharge by resonance of plasma radiation
    Qi, Bing
    Pan, Lizhu
    Zhou, Qiujiao
    Huang, Jianjun
    Liu, Ying
    PHYSICS OF PLASMAS, 2014, 21 (12)
  • [5] Dynamics of pin electrode in pin-to-plate discharge system
    Kawamoto, H
    Takasaki, K
    Yasuda, H
    IS&T'S NIP17: INTERNATIONAL CONFERENCE ON DIGITAL PRINTING TECHNOLOGIES, 2001, : 682 - 689
  • [6] Diagnosis of the ion density in two discharge modes generated in atmospheric pressure argon with pin-to-plate dielectric barrier geometry
    Qi, Bing
    Huang, Jianjun
    Qiu, Yunming
    Liu, Ying
    Liu, Lijun
    PHYSICS OF PLASMAS, 2011, 18 (08)
  • [7] Study of selective amorphous silicon etching to silicon nitride using a pin-to-plate dielectric barrier discharge in atmospheric pressure
    Kyung, Se-Jin
    Park, Jae-Beom
    Lee, June-Hee
    Lim, Jong-Tae
    Yeom, Geun-Young
    APPLIED PHYSICS LETTERS, 2007, 91 (09)
  • [8] Evolution of electron density of pin-to-plate discharge plasma under atmospheric pressure
    Feng Bo-Wen
    Wang Ruo-Yu
    Ma Yu-Peng-Xue
    Zhong Xiao-Xia
    ACTA PHYSICA SINICA, 2021, 70 (09)
  • [9] High-speed etching of SiO2 using a remote-type pin-to-plate dielectric barrier discharge at atmospheric pressure
    Oh, Jong Sik
    Park, Jae Beom
    Gil, Elly
    Yeom, Geun Young
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2010, 43 (42)
  • [10] High-speed etching of amorphous silicon using pin-to-plate dielectric barrier discharge
    Kyung, Se-Jin
    Park, Jae-Beom
    Lee, Yong-Hyuk
    Lee, June-Hee
    Yeom, Geun-Young
    SURFACE & COATINGS TECHNOLOGY, 2007, 202 (4-7): : 1204 - 1207