Mode shape analysis of microstructures by means of laser-optical methods

被引：0
|
作者：
Rümmler, N [1 ]
Schnitzer, R [1 ]
Grosser, V [1 ]
Michel, B [1 ]
机构：
[1] AMITRON Angew Mikromechatron Gmbh, D-82229 Seefeld, Germany
来源：
MICRO MATERIALS, PROCEEDINGS | 2000年
关键词：
microstructures; mode shape analysis; laser-optical methods;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1234 / 1235
页数：2
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