The use of microsphere assistance in interference microscopy with high numerical aperture objective lenses

被引:1
|
作者
Hueser, Lucie [1 ]
Pahl, Tobias [1 ]
Kuenne, Marco [1 ]
Lehmann, Peter [1 ]
机构
[1] Univ Kassel, EECS, Measurement Technol Grp, Wilhelmshoher Alice 71, D-34121 Kassel, Germany
关键词
Interference microscopy; microsphere assistance; resolution enhancement; RECONSTRUCTION; SCATTERING; RESOLUTION;
D O I
10.1117/12.2622892
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Various attempts have been discussed to overcome the lateral resolution limit and thus to enlarge the fields of application of optical interference microscopy. Microsphere assisted microscopy and interferometry have proven that the imaging of structures well below Abbe's resolution limit through near-field assistance is possible if microspheres are placed on the measured surface and utilized as near-field assisting imaging elements. The enhancement of the numerical aperture by the microspheres as well as photonic nanojets were identified to explain the resolution enhancement, but also whispering gallery modes and evanescent waves are assumed to have an influence. Up to now, to the best of our knowledge there is no complete understanding of the underlying mechanisms and no model enabling to examine ideal imaging parameters. This contribution is intended to clarify, how much the lateral resolution of an already highly resolving Linnik interferometer equipped with 100x, NA 0.9 objective lenses can be further improved by microspheres. Our simulation model is based on rigorous near-field calculations combined with the diffraction limited illumination and imaging process in an interference microscope. Here, we extend the model with respect to microsphere assisted interference microscopy providing a rigorous simulation of the scattered electric field directly above the sphere. Simulation and experimental results will be compared in the 3D spatial frequency domain and discussed in context with ray-tracing computations in order to achieve an in-depth understanding of the underlying mechanism of resolution enhancement by the mircosphere.
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页数:12
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