High pulse repetition frequency ultra violet laser micro-machining of polymers and glasses

被引：0
|
作者：
Illy, EK [1 ]
Tocher, JM [1 ]
Piper, JA [1 ]
机构：
[1] Macquarie Univ, Ctr Lasers & Applicat, Sydney, NSW 2109, Australia
来源：
LASER MATERIALS PROCESSING CONFERENCE, PTS 1 & 2: ICALEO '97 | 1997年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
As the demand for smaller manufactured structures increases, the techniques for efficient and economical UV micromachining continue to draw more attention. In the paper we investigate UV micropatterning methods in PETG, glass, and aluminium, comparing the commonly used percussion drilling with the flexible direct write methods. Issues such as sample speed and material removal rates as well as the size of heat effected areas are discussed.
引用
收藏
页码：A81 / A90
页数：10
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