Preparation of the oriented PZT thin films by nebulized spray pyrolysis

被引：0
|
作者：
Wu, GM [1 ]
Song, SG
Fu, XR
Zhang, JW
Lin, CL
机构：
[1] Xinjiang Inst Phys, Urumqi, Peoples R China
[2] Beijing Inst Petrol & Chem Technol, Div Fundamental Courses, Beijing, Peoples R China
[3] Shanghai Inst Met, Shanghai, Peoples R China
来源：
FERROELECTRICS | 1999年 / 231卷 / 1-4期
关键词：
nebulized spray pyrolysis; thin film; PZT; MgO;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
PZT thin films were deposited on Si, Pt/Si and MgO/Si substrates by nebulized spray pyrolysis (NSP). MgO thin films with (200) orientation also were deposited on Si substrates by nebulized spray pyrolysis. For the samples deposited on Si substrates, the results of RES analyses indicated that ratio of each element in final thin films was close to the started solution. We prepared the (100) oriented PZT thin films on Pt/Si substrates. We obtained also the PZT thin films with (100) preferred orientation on MgO(200)/Si.
引用
收藏
页码：781 / 786
页数：6
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