Liquid target for debris-free laser-plasma soft x-ray generation

被引:0
|
作者
Rymell, L
Berglund, M
Malmqvist, L
Hertz, HM
机构
来源
X-RAY LASERS 1996 | 1996年 / 151期
关键词
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中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A liquid-droplet target system for uninterrupted, high-repetition rate and practically debris-free laser-plasma soft x-ray generation is described. The system is based on the continuous liquid jet droplet generation method. With a table-top 70 mJ/pulse, 100 ps, lambda=532 nm Nd:YAG laser the emission is up to similar to 3x10(12) photons/(sr-pulse-spectral line) in the lambda-1-5 nm region. It is found that a synthetic UV prepulse increases x-ray emission a factor 8. Typical applications are microscopy and lithography.
引用
收藏
页码:472 / 474
页数:3
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