Resistive switching, endurance and retention properties of ZnO/ HfO2 bilayer heterostructure memory device

被引:13
|
作者
Jain, Neeraj [1 ,2 ]
Sharma, Shashi Kant [4 ]
Kumawat, Renu [3 ]
Jain, Praveen K. [2 ]
Kumar, Dayanand [5 ]
Vyas, Rishi [6 ]
机构
[1] Manipal Univ Jaipur, Dept Elect & Commun Engn, Jaipur 303007, Rajasthan, India
[2] Swami Keshvanand Inst Technol Management & Gramot, Dept Elect & Commun Engn, Jaipur 302017, Rajasthan, India
[3] Manipal Univ Jaipur, Dept Comp & Commun Engn, Jaipur 303007, Rajasthan, India
[4] Indian Inst Informat Technol, Dept Elect & Commun Engn, Ranchi 834010, Bihar, India
[5] Natl Cheng Kung Univ, Inst Microelect, Dept Elect Engn, Tainan 701, Taiwan
[6] Swami Keshvanand Inst Technol Management & Gramot, Dept Phys, Jaipur 302017, Rajasthan, India
来源
MICRO AND NANOSTRUCTURES | 2022年 / 169卷
关键词
RRAM; Endurance; Switching characteristics; Bilayer ZnO/HfO2; RRAM;
D O I
10.1016/j.micrna.2022.207366
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
This work reports the fabrication of resistive memory device with a bilayer ZnO/HfO2 structure. Highly stable and uniform bipolar resistance switching (RS) characteristics were attained when HfO2 interfacial layer is introduced in ZnO device. The bilayer device attains good resistive switching with increased resistance ON-OFF ratio of the order of similar to 10(2), better dc endurance of > 10(2) cycles and retention of >10(4) s at room temperature. X-ray Photoelectron Spectroscopy (XPS) investigation is also done and it is confirmed that oxygen vacancies in ZnO thin film are responsible for improved resistance switching. The current-voltage (I-V) relationship reveals that switching behavior of these devices is mainly dominated by Space-Charge-Limited-Current mechanism (SCLC) regulated due to localized oxygen vacancies. Effect of temperature on the electrical conductivity has also been investigated to analyze the behavior of Low Resistance States (LRS) and High Resistance States (HRS). The findings imply that the bilayer ZnO/HfO2 device structure is a promising one for upcoming non-volatile memory applications.
引用
收藏
页数:13
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