A Linear Macro/Micro Platform Design Based on FEM Simulation

In the microelectronics manufacturing domain, a linear platform plays an important role to achieve high speed, high position resolution and a long stroke. In this paper, a concept of macro/micro platform is presented by combining with a voice coil motor and a piezoelectric stack actuator. This macro/micro system was investigated by mechanical analysis, related property indices and so on. The static and modal characteristics of the macro and micro system were calculated by finite element method, and then some important conclusions were obtained. The displacement and stress distribution of macro and micro system were disclosed. The relevant change trends of displacement and stress under the different load were investigated and the first four natural vibration modes of the macro system were obtained. Finally, a structure model of macro/micro concept was designed and established by above calculation. These results provide a solid theoretical support for its application in the microelectronics manufacturing equipments.