An approach for efficiently locating and electrically contacting nanostructures fabricated via UHV-STM lithography on Si(100)

被引:16
|
作者
Hersam, MC [1 ]
Abeln, GC
Lyding, JW
机构
[1] Univ Illinois, Dept Elect & Comp Engn, Urbana, IL 61801 USA
[2] Univ Illinois, Beckman Inst Adv Sci & Technol, Urbana, IL 61801 USA
基金
美国国家科学基金会;
关键词
D O I
10.1016/S0167-9317(99)00203-8
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The development of atomically precise UHV-STM nanofabrication of metallic, dielectric, and organic nanostructures on Si(100) surfaces has created new opportunities for realizing future nanoelectronic devices. Concomitant with these opportunities are the practical challenges of efficient location/registration of nanostructures and macroscopic-to-nanoscale electrical interfaces. In this paper, we present an approach utilizing p-n junctions to contact nanostructures. The junctions are located potentiometrically and are fully compatible with UHV experimental procedures.
引用
收藏
页码:235 / 237
页数:3
相关论文
共 7 条
  • [1] Approach for efficiently locating and electrically contacting nanostructures fabricated via UHV-STM lithography on Si(100)
    Hersam, M.C.
    Abeln, G.C.
    Lyding, J.W.
    Microelectronic Engineering, 1999, 47 (01): : 235 - 237
  • [2] 利用UHV-STM观察Si(100)表面
    张兆祥
    井藤浩志
    云南大学学报(自然科学版), 1992, (S1) : 102 - 104
  • [3] 利用UHV-STM观察Si(100)表面
    张兆祥
    井藤浩志
    云南大学学报(自然科学版), 1992, (自然科学版) : 102 - 104
  • [4] Cryogenic UHV-STM study of hydrogen and deuterium desorption from Si(100)
    Foley, ET
    Kam, AF
    Lyding, JW
    Avouris, P
    PHYSICAL REVIEW LETTERS, 1998, 80 (06) : 1336 - 1339
  • [5] Initial stage of molecular adsorption on Si(100) and H-terminated Si(100) investigated by UHV-STM
    Nakajima, K
    Hashizume, T
    Heike, S
    Watanabe, S
    Ikehara, T
    Wada, Y
    Nishi, T
    SCIENCE REPORTS OF THE RESEARCH INSTITUTES TOHOKU UNIVERSITY SERIES A-PHYSICS CHEMISTRY AND METALLURGY, 1997, 44 (01): : 71 - 76
  • [6] Morphology of Si(100)-2 x 1 surface with submonolayers of LiF studied by UHV-STM
    Guo, HS
    Kawanowa, H
    Souda, R
    APPLIED SURFACE SCIENCE, 2000, 158 (1-2) : 159 - 163
  • [7] INOR 1255-Single molecule bound-free reactions of saturated hydrocarbons on Si(100): UHV-STM and quantum calculations
    Yoder, Nathan L.
    Hersam, Mark C.
    Seideman, Tamar
    Jorn, Ryan
    Fakonas, James S.
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2007, 233 : 12 - 12