Nucleation and growth of diamond film on porous silicon substrate

被引：3
|
作者：
Liao, Y [1 ]
Fang, RC
Ye, F
Shao, QY
Wang, GZ
机构：
[1] Univ Sci & Technol China, Struct Res Lab, Hefei 230026, Peoples R China
[2] Univ Sci & Technol China, Dept Phys, Hefei 230026, Peoples R China
来源：
MODERN PHYSICS LETTERS B | 1999年 / 13卷 / 05期
关键词：
D O I：
10.1142/S0217984999000221
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Nucleation and growth of diamond film on porous silicon are investigated in a hot-filament chemical vapor deposition system. The characters of diamond film are determined by scanning electronic microscopy, Raman spectra and X-ray photoelectron spectroscopy, A nucleation density of 3.6 x 10(7) cm(-2) is obtained. We find that almost air nuclei occur at the edge of the etched pores. The diamond film directly deposits on porous silicon substrate without the intermediate and no strains are found in the film.
引用
收藏
页码：159 / 165
页数：7
相关论文
共 50 条
  • [1] Nucleation and growth of diamond on silicon substrate coated with polymer
    Department of Modern Physics, Lanzhou University, Lanzhou 730000, China
    不详
    不详
    Thin Solid Films, 1 (120-124):
  • [2] Nucleation and growth of diamond on silicon substrate coated with polymer
    Chen, JS
    Wang, XJ
    Zheng, ZH
    Yan, FY
    THIN SOLID FILMS, 1999, 346 (1-2) : 120 - 124
  • [3] NUCLEATION AND INITIAL GROWTH OF DIAMOND FILM ON SI SUBSTRATE
    JIANG, N
    SUN, BW
    ZHANG, Z
    LIN, Z
    JOURNAL OF MATERIALS RESEARCH, 1994, 9 (10) : 2695 - 2702
  • [4] STUDY OF DIAMOND NUCLEATION ON POROUS SILICON
    BAI, YZ
    WANG, CL
    JIN, ZS
    LU, XY
    ZOU, GT
    CHINESE PHYSICS LETTERS, 1995, 12 (07) : 435 - 437
  • [5] Effect of diamond film nucleation and growth in different substrate pretreatment methods
    Zhou, Jian
    Wang, Jianhua
    Yuan, Runzhang
    Mei, Bingchu
    Li, Qiang
    Journal Wuhan University of Technology, Materials Science Edition, 1999, 14 (03): : 48 - 52
  • [6] The effect of diamond film nucleation and growth in different substrate pretreatment methods
    Zhou, JA
    Wang, JH
    Yuan, RZ
    Mei, BC
    Li, QA
    JOURNAL OF WUHAN UNIVERSITY OF TECHNOLOGY-MATERIALS SCIENCE EDITION, 1999, 14 (03): : 48 - 52
  • [7] THE EFFECT OF DIAMOND FILM NUCLEATION AND GROWTH IN DIFFERENT SUBSTRATE PRETREATMENT METHODS
    周健
    Journal of Wuhan University of Technology-Materials Science, 1999, (03) : 48 - 52
  • [8] NUCLEATION OF DIAMOND FILM GROWTH BY BUCKYTUBES
    LI, YB
    ZHU, YQ
    GAO, ZD
    LIANG, J
    WEI, BQ
    WU, DH
    HUI, MJ
    JOURNAL OF MATERIALS SCIENCE LETTERS, 1995, 14 (18) : 1281 - 1282
  • [9] Substrate pre-treatment by ultrasonication with diamond powder mixtures for nucleation enhancement in diamond film growth
    Buijnsters, J. G.
    Vazquez, L.
    ter Meulen, J. J.
    DIAMOND AND RELATED MATERIALS, 2009, 18 (10) : 1239 - 1246
  • [10] Enhanced diamond nucleation on electrolysis pretreated silicon substrate
    Suzhou Univ, Suzhou, China
    Gongneng Cailiao, 5 (555-556):
12345