A study of the deposition process of multilayer coatings on the inner tube surface with the pulsed laser deposition technique

被引：10
|
作者：
Lozovan, A. A. [1 ]
Alexandrova, S. S. [1 ]
Mishnev, M. A. [1 ]
Prishepov, S. V. [1 ]
机构：
[1] MATI Russian State Technol Univ, Moscow 121552, Russia
来源：
JOURNAL OF ALLOYS AND COMPOUNDS | 2014年 / 586卷
关键词：
Multilayer Ti/TiN/Ti coatings; Pulsed laser deposition; Light absorption and reflection; X-ray spectroscopies; Rutherford backscattering spectroscopy; SOURCE ION-IMPLANTATION; DIAMETER STEEL TUBE; HARD SUPERLATTICES; CARBON-FILMS; METAL TUBES; THIN-FILMS; ORIGIN; WALL; CU;
D O I：
10.1016/j.jallcom.2013.04.191
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The multilayer Ti/TiN/Ti coatings (consisting of nano-scale layers) on the inner surface of stainless steel tubes of small diameter were studied. The coatings were deposited by using the pulsed laser deposition (PLD) technique (in the reactive and non-reactive deposition modes). The coatings were analyzed using the X-ray fluorescence analysis with total external reflection (TXRF) and the Rutherford backscattering spectroscopy (RBS). It was found that the deposition of multilayer Ti/TiN/Ti coatings leads to the essential mixing of coating layers due to sputtering of coatings with fast atoms and ions from the laser plume and the evaporation of the coating under the laser radiation reflected from the target surface. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码：S387 / S390
页数：4
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