A 1.5V supplied, CMOS asic for the actuation of an electrostatic micromotor

被引：6
|
作者：
Favrat, P [1 ]
Paratte, L [1 ]
Ballan, H [1 ]
Declercq, M [1 ]
deRooij, NF [1 ]
机构：
[1] ECOLE POLYTECH FED LAUSANNE,SWISS FED INST TECHNOL,ELECT LAB EL LEG ECUBLENS,CH-1015 LAUSANNE,SWITZERLAND
来源：
NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS | 1996年
关键词：
D O I：
10.1109/MEMSYS.1996.493824
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
引用
收藏
页码：25 / 31
页数：7
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