Monitoring particulate contaminants in a metal etch system

被引：0
|
作者：
Dang, K
Desanti, T
Yoo, B
Khawaja, Y
机构：
来源：
1996 ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE AND WORKSHOP - ASMC 96 PROCEEDINGS: THEME - INNOVATIVE APPROACHES TO GROWTH IN THE SEMICONDUCTOR INDUSTRY | 1996年
关键词：
D O I：
10.1109/ASMC.1996.558022
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：292 / 292
页数：1
相关论文
共 50 条
  • [1] In situ particle monitoring of a single wafer metal etch system
    Busselman, B
    INSTITUTE OF ENVIRONMENTAL SCIENCES 1996 PROCEEDINGS - CONTAMINATION CONTROL: SYMPOSIUM ON MINIENVIRONMENTS/42ND ANNUAL TECHNICAL MEETING - EXPANDING OUR TECHNICAL EXCELLENCE THROUGH EDUCATION, 1996, : 268 - 275
  • [2] Metal etch system
    不详
    MICRO, 1995, 13 (08): : 62 - 62
  • [3] Monitoring of contaminants in suspended particulate matter as an alternative to sediments
    Schubert, Birgit
    Heininger, Peter
    Keller, Martin
    Ricking, Mathias
    Claus, Evelyn
    TRAC-TRENDS IN ANALYTICAL CHEMISTRY, 2012, 36 : 58 - 70
  • [4] EMBEDDED PARTICULATE CONTAMINANTS IN TEXTURED METAL IMPLANT SURFACES
    RICCI, JL
    KUMMER, FJ
    ALEXANDER, H
    CASAR, RS
    JOURNAL OF APPLIED BIOMATERIALS, 1992, 3 (03) : 225 - 230
  • [5] In-line monitoring of particulate contaminants and composition in polymer extrusion
    1600, (72):
  • [6] IN-LINE MONITORING OF PARTICULATE CONTAMINANTS AND COMPOSITION IN POLYMER EXTRUSION
    DESA, S
    RESHADAT, R
    CLUETT, WR
    BALKE, ST
    HALL, JW
    HORN, JT
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1995, 209 : 11 - PMSE
  • [7] Monitoring the atmospheric deposition of particulate-associated urban contaminants, Coventry, UK
    Charlesworth, S. M.
    Booty, C.
    Beasant, J.
    HIGHWAY AND URBAN ENVIRONMENT, 2007, 12 : 155 - +
  • [8] Air cleaners for particulate contaminants (TC 2.4, Particulate Air Contaminants and Particulate Contaminant Removal Equipment)
    ASHRAE Handbook,
  • [9] Environmental monitoring system detects chemical contaminants
    不详
    MATERIALS PERFORMANCE, 1998, 37 (10) : 61 - 61
  • [10] High resolution size characterization of particulate contaminants for radioactive metal waste treatment
    Lee, Min-Ho
    Yang, Wonseok
    Chae, Nakkyu
    Choi, Sungyeol
    NUCLEAR ENGINEERING AND TECHNOLOGY, 2021, 53 (07) : 2277 - 2288
12345