Using direct nanoimprinting of ferroelectric films to prepare devices exhibiting bi-directionally tunable surface plasmon resonances

被引：32

作者：

Chen, H. L. ^{[1
]}

Hsieh, K. C. ^{[1
]}

Lin, C. H. ^{[2
]}

Chen, S. H. ^{[3
]}

机构：

[1] Natl Taiwan Univ, Dept Mat Sci & Engn, Taipei 10617, Taiwan

[2] Natl Cheng Kung Univ, Inst Electroopt Sci & Engn, Tainan 70101, Taiwan

[3] Natl Nano Device Lab, Hsinchu 30078, Taiwan

来源：

NANOTECHNOLOGY | 2008年 / 19卷 / 43期

关键词：

D O I：

10.1088/0957-4484/19/43/435304

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this paper, we describe an imprint method for the fabrication of bi-directionally tunable surface plasmon resonance (SPR) filters. A periodic metal/ferroelectric film stack exhibiting SPR phenomena was directly imprinted using a sharp mold without the need for a polymer-based resist. Both the refractive index of the surrounding lead zirconate titanate (PZT) films and the period of the textured PZT/metal/PZT structure were dependent upon both the absolute value and sign of the applied potential. The SPR wavelength of the PZT/gold/PZT-based tunable filter varied over a range of greater than 100 nm when applying potentials ranging from 0 to -15 V. This imprinting method has great potential for use in the fabrication of tunable optical filters without the need for complicated processes or specific materials.

引用

页数：6