Superdense glow discharge: Theoretical model of the cathode region

A physical model and a theoretical model of superdense hollow-cathode glow discharge are suggested. The theory includes the balance of the charged and neutral components of plasma, the energy balance for beam and plasma electrons, and the energy balance for atoms. Of importance is the inclusion of the inertial term in the equation of motion for ions and the inclusion of the deceleration of atoms by the force of friction of ion flow, as well as the inclusion of the heating of atoms. The equations for the calculation of the discharge parameters are derived in the dimensionless form facilitating the use of the results. The typical discharge modes are calculated, and the coordinate dependences are determined of the plasma concentration, the velocity of ions, and the number density, velocity and temperature of atoms. The limiting modes of discharge are investigated.