Laser feedback interferometry based on high density cosine-like intensity fringes with phase quasi-quadrature

被引：2

作者：

Zeng, Zhaoli ^{[1
]}

Zhang, Shulian ^{[1
]}

Tan, Yidong ^{[1
]}

机构：

[1] Tsinghua Univ, Dept Precis Instruments, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China

来源：

OPTICS EXPRESS | 2013年 / 21卷 / 08期

基金：

中国国家自然科学基金;

关键词：

DIODE INTERFEROMETER; OPTICAL FEEDBACK; DISTURBANCE;

D O I：

10.1364/OE.21.010019

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A novel laser feedback interferometry based on high-order feedback is presented and realized for the first time. The interferometer uses a birefringence dual frequency laser and a tilted feedback mirror with high amplitude reflectivity to generate high density cosine-like optical fringes. These optical fringes have nanoscale resolution. Particularly, phase quasi-quadrature between the dual frequency fringes is obtained because of the phase shift caused by the changes of external optical path length. This phase characteristic can be used to distinguish the direction of movement easily. Under typical room conditions, the system's resolution is 0.51nm in 850 mu m range, and its 2 min displacement accuracy is 5nm. (c) 2013 Optical Society of America

引用

页码：10019 / 10024

页数：6