Influence of substrate temperature and post deposition annealing on the properties of vacuum deposited ZnSe thin films

被引：12
|
作者：
Rao, K. Gowrish [1 ]
Bangera, Kasturi V. [2 ]
Shivakumar, G. K. [2 ]
机构：
[1] Manipal Univ, Manipal Inst Technol, Dept Phys, Manipal 576104, Udupi, India
[2] Natl Inst Technol Karnataka, Dept Phys, Thin Film Lab, Mangalore 575025, India
来源：
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | 2013年 / 16卷 / 02期
关键词：
Zinc selenide; Vapour deposition; Hall effect; Optical properties; NANORODS;
D O I：
10.1016/j.mssp.2012.10.015
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The effects of substrate temperature and post deposition annealing on the structural, optical and electrical properties of vacuum deposited ZnSe thin films are presented here. The chemical composition of the films varied drastically with substrate temperature which in turn caused changes in various properties of the films. The grain size of the films increased with substrate temperature and also after annealing. The electrical properties of the films were found to be varying as a function of chemical composition and grain size. (c) 2012 Elsevier Ltd. All rights reserved.
引用
收藏
页码：269 / 273
页数：5
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