Nanoimprint lithography of plasmonic platforms for SERS applications

被引:17
|
作者
Barcelo, Steven J. [1 ]
Wu, Wei [2 ]
Li, Xuema [1 ]
Li, Zhiyong [1 ]
Williams, R. Stanley [1 ]
机构
[1] Hewlett Packard Labs, Palo Alto, CA 94304 USA
[2] Univ So Calif, Ming Hsieh Dept Elect Engn, Los Angeles, CA 90089 USA
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2015年 / 121卷 / 02期
关键词
ENHANCED RAMAN-SPECTROSCOPY; SILVER NANOPARTICLES; SURFACE; FABRICATION; SCATTERING; METAL; GOLD; ASSEMBLIES; IMPRINT; DIMERS;
D O I
10.1007/s00339-015-9073-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this review, we describe the use of nanoimprint lithography in our group to fabricate plasmonic platforms with nanometer-scale critical features that would be significantly more expensive using other fabrication techniques: 3-D cones that have tips with a sub-10 nm radius of curvature, active polygonal nanofingers with sub-2 nm spacing, and deterministic nanoparticle assemblies both on arbitrary substrates and in solution. These nanostructures were primarily designed to make surface-enhanced Raman Scattering a viable analytical technique for low-level chemical and biological contaminants, but the same fabrication methods should also be useful for other nanophotonic and nanoelectronic applications.
引用
收藏
页码:443 / 449
页数:7
相关论文
共 50 条
  • [1] Nanoimprint lithography of plasmonic platforms for SERS applications
    Steven J. Barcelo
    Wei Wu
    Xuema Li
    Zhiyong Li
    R. Stanley Williams
    Applied Physics A, 2015, 121 : 443 - 449
  • [2] Inherently Reproducible Fabrication of Plasmonic Nanoparticle Arrays for SERS by Combining Nanoimprint and Copolymer Lithography
    Krishnamoorthy, Sivashankar
    Krishnan, Sathiyamoorthy
    Thoniyot, Praveen
    Low, Hong Yee
    ACS APPLIED MATERIALS & INTERFACES, 2011, 3 (04) : 1033 - 1040
  • [3] Multilevel Nanoimprint Lithography for Plasmonic Pixels Printing
    Shahidan, Muhammad Faris Shahin
    Song, Jingchao
    James, Timothy D.
    Roberts, Ann
    2020 CONFERENCE ON LASERS AND ELECTRO-OPTICS PACIFIC RIM (CLEO-PR), 2020,
  • [4] Rapid preparation of paper-based plasmonic platforms for SERS applications
    Jang, Wongi
    Byun, Hongsik
    Kim, Jun-Hyun
    MATERIALS CHEMISTRY AND PHYSICS, 2020, 240
  • [5] Au nanostructure arrays for plasmonic applications: annealed island films versus nanoimprint lithography
    Andrii M Lopatynskyi
    Vitalii K Lytvyn
    Volodymyr I Nazarenko
    L Jay Guo
    Brandon D Lucas
    Volodymyr I Chegel
    Nanoscale Research Letters, 2015, 10
  • [6] Au nanostructure arrays for plasmonic applications: annealed island films versus nanoimprint lithography
    Lopatynskyi, Andrii M.
    Lytvyn, Vitalii K.
    Nazarenko, Volodymyr I.
    Guo, L. Jay
    Lucas, Brandon D.
    Chegel, Volodymyr I.
    NANOSCALE RESEARCH LETTERS, 2015, 10 : 1 - 9
  • [7] Fabrication of plasmonic waveguides by nanoimprint and UV-lithography
    Nielsen, Rasmus B.
    Boltasseva, Alexandra
    Kristensen, Anders
    Bozhevolnyi, Sergey I.
    Volkov, Valentyn S.
    Cuesta, Irene Fernandez
    Klukowska, Anna
    ADVANCED FABRICATION TECHNOLOGIES FOR MICRO/NANO OPTICS AND PHOTONICS, 2008, 6883
  • [8] Nanoimprint lithography: Capabilities, applications, and challenges
    Hu, Walter Wenchuang
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2006, 231
  • [9] Nanoimprint Lithography of Al Nanovoids for Deep-UV SERS
    Ding, Tao
    Sigle, Daniel O.
    Hermann, Lars O.
    Wolverson, Daniel
    Baumberg, Jeremy J.
    ACS APPLIED MATERIALS & INTERFACES, 2014, 6 (20) : 17358 - 17363
  • [10] Scalable and Consistent Fabrication of Plasmonic colors via Nanoimprint Lithography
    Shahidan, M. Faris Shahin
    Song, Jingchao
    James, Timothy D.
    Mulvaney, Paul
    Roberts, Ann
    SPIE MICRO + NANO MATERIALS, DEVICES, AND APPLICATIONS 2019, 2019, 11201