A Design of Spring Constant Arranged for MEMS Accelerometer by Multi-layer Metal Technology

被引：0
|
作者：
Yamane, Daisuke [1 ,2 ]
Konishi, Toshifumi [3 ]
Safu, Teruaki [3 ]
Toshiyoshi, Hiroshi [2 ,4 ]
Sone, Masato [1 ,2 ]
Masu, Kazuya [1 ,2 ]
Machida, Katsuyuki [1 ,2 ,3 ]
机构：
[1] Tokyo Inst Technol, Yokohama, Kanagawa, Japan
[2] JST, CREST, Saitama, Japan
[3] NTT Adv Technol Corp, Kawasaki, Kanagawa, Japan
[4] Univ Tokyo, Tokyo, Japan
来源：
2016 IEEE 11TH ANNUAL INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS) | 2016年
关键词：
Spring constant; MEMS; acceleroemter; multi-layer metal; serpentine; high-density proof mass;
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
We report an approach to design spring constant arranged for MEMS accelerometers fabricated by multi-layer metal technology. The proposed multi-layer metal structure can control the spring constant of serpentine flexure to suspend high-density proof mass. Moreover, the multi-layer metal configuration enables us to obtain high degree of freedom of spring constant design without compromising the performance of the MEMS accelerometer. A proof-of-concept device has been fabricated, and the measured characteristics of the proposed micromechanical springs were consistent with the design values.
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页数：4
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