Organic-Based Micropillar Structure Fabrication by Advanced Focused Ion Beam Milling Techniques

被引：0

作者：

Hung, Wen-Chang ^{[1
]}

Adawi, Ali M. ^{[2
]}

Cadby, Ashley ^{[2
]}

Connolly, Liam G. ^{[2
]}

Deanl, Richard ^{[2
]}

Tahraoui, Abbes ^{[1
]}

Fox, A. M. ^{[2
]}

Lidzey, David G. ^{[2
]}

Cullis, A. G. ^{[1
]}

机构：

[1] Univ Sheffield, Dept Elect & Elect Engn, Mappin St, Sheffield S1 3JD, S Yorkshire, England

[2] Univ Sheffield, Dept Phys & Astron, Sheffield S3 7RH, S Yorkshire, England

来源：

MICROSCOPY OF SEMICONDUCTING MATERIALS 2007 | 2008年 / 120卷

关键词：

D O I：

暂无

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this study, we first report organic material based micropillar structures fabricated using advanced techniques based upon focused ion beam milling processes. Such a method provides a faster milling procedure as the beam of ions directly etches through the layers of the materials without damaging the organic material, unlike conventional dry or wet etching processes. It is very promising that FIB milling methods should be able to underpin organic-based photonic device research in the future.

引用

页码：449 / +

页数：2

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