Fabrication of thin-film phase grating using surface acoustic waves

被引：1
|
作者：
Watanabe, M
Yawata, M
Kakio, S
Nakagawa, Y
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1997年 / 36卷 / 5B期
关键词：
phase grating; surface acoustic wave; differential interface microscope;
D O I：
10.1143/JJAP.36.3119
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
By depositing a thin film on a substrate in which a standing surface wave is excited, we fabricated a phase grating in which variations in the film thickness as well as the refractive index occurred at half the wavelength of the surface acoustic waves. As no such phenomenon has been reported until now, its application for optical elements is expected.
引用
收藏
页码：3119 / 3120
页数：2
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