Common-path laser encoder with Littrow configuration

被引：5
|
作者：
Wu, Chyan-Chyi [1 ]
Liao, Chia-Huang [1 ]
Chen, Yan-Zou [1 ,2 ]
Yang, Jhih-Sheng [1 ]
机构：
[1] Tamkang Univ, Dept Mech & Electromech Engn, New Taipei City 25137, Taiwan
[2] Natl Taiwan Univ, Inst Engn Mech, Taipei, Taiwan
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2013年 / 193卷
关键词：
Common-path; Grating; Littrow; Tolerance; Runout; LINEAR ENCODER; HIGH-ACCURACY; INTERFEROMETRY; ERROR; TOLERANCE; AIR;
D O I：
10.1016/j.sna.2012.12.035
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper proposes a novel common-path laser encoder with a Littrow configuration (CPLi). The CPLi combines the merits of the 1 - x telescope and Littrow mount so that the CPLi can have high tolerance to head-to-scale runout. The CPLi can effectively slash the environmental disturbance effect to its lowest level. The runout tolerance is found to be 1.5-3 times greater than that of our previous work. The experimental results of the CPLi match well with those of the HP5529A for long-range measurements. The CPLi attains a measurement resolution of 0.12+/-0.021 nm. Its system stability is as low as -0.25+/-0.098 nm/h. It has a promising potential for nanometer resolution and long-range applications. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码：69 / 78
页数：10
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