Polymer Pen Lithography Using Dual-Elastomer Tip Arrays

被引：35
|
作者：
Xie, Zhuang [1 ]
Shen, Youde [1 ]
Zhou, Xuechang [1 ]
Yang, Yong [3 ]
Tang, Qing [4 ]
Miao, Qian [4 ]
Su, Jing [5 ]
Wu, Hongkai [5 ]
Zheng, Zijian [1 ,2 ]
机构：
[1] Hong Kong Polytech Univ, Nanotechnol Ctr, Inst Text & Clothing, Hong Kong, Hong Kong, Peoples R China
[2] Hong Kong Polytech Univ, Adv Res Ctr Fash & Text, Shenzhen Res Inst, Shenzhen, Peoples R China
[3] Hong Kong Polytech Univ, Dept Mech Engn, Hong Kong, Hong Kong, Peoples R China
[4] Chinese Univ Hong Kong, Dept Chem, Shatin, Hong Kong, Peoples R China
[5] Hong Kong Univ Sci & Technol, Dept Chem, Kowloon, Hong Kong, Peoples R China
来源：
SMALL | 2012年 / 8卷 / 17期
关键词：
scanning probe lithography; surface patterning; polymer pen lithography; dip-pen nanolithography; soft lithography; SOFT LITHOGRAPHY; FEATURE SIZE; NANOLITHOGRAPHY; PARALLEL; DIMENSIONS; SURFACES;
D O I：
10.1002/smll.201200849
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
引用
收藏
页码：2664 / 2669
页数：6
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