Characterization of damping in vibrating microplates through measurements in the time domain

被引：0

作者：

De Pasquale, Giorgio ^{[1
]}

Soma, Aurelio ^{[1
]}

机构：

[1] Politecn Torino, Dept Mech & Aerosp Engn, I-10129 Turin, Italy

来源：

2012 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP) | 2012年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a study about the measurement of damping in microplates for MEMS applications as switches, varactors, transceivers, radio frequency devices and energy harvesters. Through the measurement of applied force and displacement in the time domain, the hysteresis curve is obtained; by using an energetic approach, the dissipative effects acting on the structure are derived and the damping coefficient is estimated. The results are compared with damping values obtained with two alternative experimental strategies: the response decay to a step force and the half power method applied to the frequency response function.

引用

页码：76 / 81

页数：6

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