Kinetics of gas response to reducing gases of SnO2 films, deposited by spray pyrolysis

被引：96
|
作者：
Korotcenkov, G
Brinzari, V
Golovanov, V
Blinov, Y
机构：
[1] Tech Univ Moldova, Dept Microelectron, MD-2004 Kishinev, Moldova
[2] S Ukrainian Univ, UA-65008 Odessa, Ukraine
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2004年 / 98卷 / 01期
关键词：
SnO2 thin films; gas response; kinetics; chemisorbed species;
D O I：
10.1016/j.snb.2003.08.022
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
The present paper is devoted to systematic measurements of SnO2 gas response to reducing gases in transient mode. SnO2 films were deposited by spray pyrolysis from SnCl4-Water solution. The influence of operation temperature (25-500degreesC) on gas response (S) to CO and H-2 (0.1-0.5%), response time (tau), shape of S(T) curves, and activation energy of tau(1/kT) dependencies is discussed. Three operating temperature ranges with different activation energies of 0.3-0.38,0.6-0.7, and 1.1-1.4eV were selected on tau(1/kT) dependencies. The mechanism of oxygen and water influence on gas sensing characteristics of SnO2 films has been proposed. It was concluded that adsorption/desorption processes of molecular oxygen, hydroxyl groups, and atomic oxygen have dominant influence on electro-physical and gas sensing characteristics of SnO2 films in the temperature ranges of 25-150; 200-400 and >450degreesC, respectively. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码：41 / 45
页数：5
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