Preparation of SrTiO3 Thin Films by Liquid Phase Deposition Method on Self-assembled Monolayers

(NH4)(2)TiF6, SrNO3 and H3BO4 were used as raw materials to prepare the precursor solution. The self-assembled substrates processed by OTS were put into the oversaturated precursor solution. By the inducement of the functional SAMs, SrTiO3 thin films were prepared through a one-step process at ambient temperature by combining the LPD method with the SAM technique. The pH value of the precursor solution was 3.0, the component concentrations of AHFT, SN and BA were 0.125 mol.L-1, 0.125 mol.L-1 and 0.375 mol.L-1 respectively, while the deposition temperature was 50 degrees C and the deposition time was 26 h. All of above were favorable for the crystallization and growth of SrTiO3 thin films. XRD, AFM and SEM were used to characterize the physical phase and the surface morphology of the thin films which were annealed at 600 degrees C for 4 h. The results indicate that the as-deposited thin film is well crystallized with a pure phase of SrTiO3 and the SrTiO3 particles display a growth of clear sphere crystals. The as-deposited thin films are uniform and dense.