The performance of Al plasmon enhanced ß-Ga2O3 solar-blind photodetector

被引:1
|
作者
Yu JianGang [1 ,3 ]
Li Qiang [1 ]
Yao HuiZhen [1 ]
Li XiuYuan [1 ]
Yu Miao [3 ]
Jia Renxu [3 ]
Zhang LiChun [2 ]
机构
[1] North Univ China, Sch Instrument & Elect, State Key Lab Dynam Measurement Technol, Taiyuan 030051, Peoples R China
[2] Ludong Univ, Sch Phys & Optoelectron Engn, Yantai 264025, Peoples R China
[3] Xidian Univ, Sch Microelectron, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R China
关键词
solar-blind photodetectors; surface plasmons; gallium oxide; Al nanoparticles; PHOTORESPONSE; DETECTOR; MOS2;
D O I
10.1360/SSPMA-2022-0008
中图分类号
P1 [天文学];
学科分类号
0704 ;
摘要
The surface plasmon effect based on metal nanoparticles can enhance the local electric field strength and exhibit excellent light trapping capabilities, which can effectively improve the performance of optoelectronic devices. In this study, combined with the Finite Difference Time Domain (FDTD) method and magnetron sputtering technology, the effects of metallic Al nanoparticles on the photoelectric characteristics of ss-Ga2O3 solar-blind photodetectors are studied theoretically and experimentally. The results show that Al nanoparticles with a radius of 30 nm can produce an LSPR effect under 254 nm solar-blind ultraviolet light. Due to the LSPR effect of Al NPs, the spectral responsivity and detectivity of the ss-Ga2O3 solar-blind photodetector have been increased by 4.7 times and 6 times, respectively, and the dark current of the device has been reduced to 62.5% of the original value. This study provides a theoretical and experimental basis for the application of Al NPs in the solar-blind band, and provides a new method for further improving the performance of solar-blind photodetectors.
引用
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页数:9
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