A Monothically Integrated Dual-Wavelength Photodetector with a Step-Shaped Fabry-Perot Filter

被引:0
|
作者
Fan, Xinye [1 ]
Huang, Yongqing [1 ]
Ren, Xiaomin [1 ]
Duan, Xiaofeng [1 ]
Hu, Fuquan [1 ]
Wang, Qi [1 ]
Cai, Shiwei [1 ]
机构
[1] Beijing Univ Posts & Telecommun, State Key Lab Informat Photon & Opt Commun, Beijing 100876, Peoples R China
关键词
Photodetectors; dual-wavelength; heteroepitaxy; long wavelength; GAAS SUBSTRATE; CAVITY; TRANSMISSION; VCSELS; ARRAY;
D O I
10.1117/12.973659
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
A novel long wavelength photodetector with dual-wavelength response has been designed and fabricated, which can be realized by a step-shaped Fabry-Perot (F-P) filter structure. By using low pressure metal organic chemical vapor deposition (LP-MOCVD), the step-shaped GaAs/AlGaAs distributed Bragg reflectors (DBR) and the InP PIN photodetector are grown on a GaAs substrate, and by employing a thin low temperature buffer layer, the high quality GaAs/InP heteroepitaxy is realized. The structure of the photodetector is optimized by theoretical simulation. This device has a dual-peak distance of 19nm (1558, 1577 nm). The peak quantum efficiency of 8.5% around 1558 nm and 8.6% around 1577 nm, the 3dB bandwidth of 16 GHz are simultaneously obtained.
引用
收藏
页数:6
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