The impact of the Pb(Zr,Ti)O3-ZnO interface quality on the hysteretic properties of a metal-ferroelectric-semiconductor structure

被引:18
|
作者
Pintilie, I. [1 ]
Pasuk, I. [1 ]
Ibanescu, G. A. [1 ]
Negrea, R. [1 ]
Chirila, C. [1 ]
Vasile, E. [2 ]
Pintilie, L. [1 ]
机构
[1] Natl Inst Mat Phys, Magurele 077125, Romania
[2] METAV CDSA, Bucharest 020011, Romania
关键词
ZNO THIN-FILMS; ELECTRICAL CHARACTERISTICS; GROWTH; SUBSTRATE; DEPOSITION;
D O I
10.1063/1.4765723
中图分类号
O59 [应用物理学];
学科分类号
摘要
The hysteretic properties of metal-ferroelectric-semiconductor (MFS) structures based on Pb(Zr0.2Ti0.8)O-3 (PZT) and ZnO films were studied with respect of the quality of the PZT-ZnO interface. The films were grown by pulsed laser deposition (PLD) on platinized silicon (Pt/Si) substrate and on single crystal, (001) oriented SrTiO3 (STO) substrates. The structural analysis has revealed that the PZT-ZnO stack grown on single crystal STO is epitaxial, while the structure grown on Pt/Si has columnar texture. The temperature change of the capacitance-voltage (C-V) hysteresis direction, from clockwise at low temperatures to counter clockwise at high temperatures, was observed at around 300K in the case of the MFS structure grown by PLD on Pt/Si substrate. This temperature is lower than the one reported for the case of the PZT-ZnO structure grown by sol-gel on Pt/Si substrate (Pintilie et al., Appl. Phys. Lett. 96, 012903 (2010)). In the fully epitaxial structures the C-V hysteresis is counter clockwise even at 100K. These findings strongly points out that the quality of the PZT-ZnO interface is essential for having a C-V hysteresis of ferroelectric nature, with negligible influence from the part of the interface states and with a memory window of about 5V at room temperature. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4765723]
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页数:8
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