Laser spectroscopy of the products of photoevaporation with a short-wavelength (λ=193 nm) excimer laser

被引：0
|
作者：
Gochelashvili, KS
Zemskov, ME
Evdokimova, ON
Mihkelsoo, VT
Prokhorov, AM
机构：
[1] Russian Acad Sci, Inst Gen Phys, Moscow 117942, Russia
[2] Tartu State Univ, EE-202400 Tartu, Estonia
来源：
QUANTUM ELECTRONICS | 1999年 / 29卷 / 02期
关键词：
D O I：
10.1070/QE1999v029n02ABEH001440
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An excimer laser spectrometer was designed and constructed. It consists of a high-vacuum interaction chamber, a short-wavelength (lambda = 193 nm) excimer ArF laser used for evaporation, a probe dye laser pumped by an XeCl excimer laser, and a system for recording a laser-induced fluorescence signal. This spectrometer was used to investigate nonthermal mechanisms of photoevaporation of a number of wide-gap dielectrics.
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收藏
页码：168 / 170
页数：3
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