Growth mechanism of carbon nanotubes grown by microwave-plasma-enhanced chemical vapor deposition

被引：0
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作者：
Okai, M
Muneyoshi, T
Yaguchi, T
Sasaki, S
Shinohara, H
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来源：
ELECTRONIC PROPERTIES OF MOLECULAR NANOSTRUCTURES | 2001年 / 591卷
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T [工业技术];
学科分类号：
08 ;
摘要：
To understand the growth mechanism of carbon nanotubes, we have investigated the initial stage of carbon nanotube growth by microwave-plasma-enhanced CVD on a metal substrate. Metal droplets with diameters of 20-180 nm appeared on the substrate surface after plasma cleaning. These metal droplets operate as a catalyst for the growth of carbon nanotubes. The grown nanotubes had a piled-cone structure with metal particles at the top. The diameters of the carbon nanotubes ranged from 60 to 80 nm and the metal particles at the top were the same sizes.
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页码：187 / 190
页数：4
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