A compact 1 x 64 optical power splitter using silica-based PLC on quartz substrate

被引：13

作者：

Wang, Liangliang ^{[1
]}

An, Junming ^{[1
]}

Wu, Yuanda ^{[1
]}

Wang, Yue ^{[1
]}

Zhang, Jiashun ^{[1
]}

Li, Jianguang ^{[1
]}

Wang, Hongjie ^{[1
]}

Zhang, Xiaoguang ^{[1
]}

Pan, Pan ^{[1
]}

Dai, Hongqing ^{[1
]}

Qi, Ying ^{[1
]}

Zhong, Fei ^{[2
]}

Zha, Qiang ^{[1
]}

Hu, Xiongwei ^{[1
]}

Zhao, Degang ^{[1
]}

机构：

[1] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China

[2] Henan Shi Jia Photons Technol Co Ltd, Hebi 458030, Peoples R China

来源：

OPTICS AND LASER TECHNOLOGY | 2014年 / 61卷

基金：

中国国家自然科学基金; 国家高技术研究发展计划(863计划);

关键词：

PLC; Splitter; Waveguide; FUSED FIBER COUPLERS; FABRICATION;

D O I：

10.1016/j.optlastec.2014.02.002

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this paper, a compact and low wavelength-dependence loss (WDL) 1 Chi 64 optical power splitter is fabricated using silica-based PLC technology on quartz substrate. The cascaded Y-branch structures are optimized in detail, and a compact 1 x 64 optical power splitter layout is obtained. The measured results show that the insertion loss (IL), the uniformity and WDL of the best results of all splitters are less than 19.2 dB, 1.0 dB and 0.5 dB, respectively, in the wavelength range from 1.26 mu m to 1.65 mu m, and the total product ratio of Standard grade in a whole 6 in. wafer is more than 80%. The results imply that our technology completely satisfies the need of mass manufacture. (C) 2014 Elsevier Ltd. All rights reserved.

引用

页码：45 / 49

页数：5

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