Influence of Heat Treatment Conditions on the Properties of Vanadium Oxide Thin Films for Thermochromic Applications

被引：2
|
作者：
Kim, Donguk [1 ]
Kwon, Samyoung [2 ]
Park, Young [2 ]
Boo, Jin-Hyo [3 ]
Nam, Sang-Hun [3 ]
Joo, Yong Tae [4 ]
Kim, Minha [1 ]
Lee, Jaehyeong [1 ]
机构：
[1] Sungkyunkwan Univ, Sch Elect & Elect Engn, Suwon 440746, South Korea
[2] Korea Railrd Res Inst, High Speed Railrd Infrastruct Syst Res Team, Uiwang 437757, South Korea
[3] Sungkyunkwan Univ, Dept Chem, Suwon 440746, South Korea
[4] Young Do Glass Ind Co Ltd, Umseong 369854, South Korea
来源：
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | 2016年 / 16卷 / 05期
关键词：
Vanadium Oxide; Thermochromic; Reactive Pulsed-Dc Magnetron Sputtering; Optical Properties; Structural Properties; DIOXIDE; TRANSITION;
D O I：
10.1166/jnn.2016.12172
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
In present work, the effects of the heat treatment on the structural, optical, and thermochromic properties of vanadium oxide films were investigated. Vanadium dioxide (VO2) thin films were deposited on glass substrate by reactive pulsed DC magnetron sputtering from a vanadium metal target in mixture atmosphere of argon and oxygen gas. Various heat treatment conditions were applied in order to evaluate their influence on the crystal phases formed, surface morphology, and optical properties. The films were characterized by an X-ray diffraction (XRD) in order to investigate the crystal structure and identify the phase change as post-annealing temperature of 500-600 degrees C for 5 minutes. Surface conditions of the obtained VO2(M) films were analyzed by field emission scanning electron microscopy (FE-SEM) and the semiconductor-metal transition (SMT) characteristics of the VO2 films were evaluate by optical spectrophotometry in the UV-VIS-NIR, controlling temperature of the films.
引用
收藏
页码：4968 / 4972
页数：5
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