ADAPTIVE ON-LINE SELF-CALIBRATION OF ERRORS IN MULTI-STAGE-NOISE-SHAPING (MASH) SIGMA-DELTA MODULATOR GYROSCOPE

被引：0

作者：

Chen, Fang ^{[1
]}

Wen, Zuxiang ^{[2
]}

Zhou, Wei ^{[1
]}

Ni, Zao ^{[1
]}

Li, Xinxin ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai, Peoples R China

[2] Soochow Univ, Suzhou, Peoples R China

来源：

2020 33RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2020) | 2020年

基金：

中国国家自然科学基金; 上海市自然科学基金;

关键词：

Gyroscope; self-calibrated; sigma-delta modulator; MASH; adaptive; parameters matching;

D O I：

10.1109/mems46641.2020.9056406

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper introduces a novel adaptive self-calibrated multistage-noise-shaping (MASH-like) electro mechanical sigma delta modulator sensing scheme for MEMS Coriolis gyroscope. The proposed system adopts an online adaptive MASH2-0 modulator for a MEMS tuning-fork gyroscope which without using any additional mechanical calibration method. It effectively removes quantization errors that leaks through at the output due to parameters mismatching between gyroscope sensing element imperfections and interface digital modulator. It also allows the correction of spectral distortion and gain mismatch in the signal path due to non-ideal signal transfer function. Results demonstrate that the proposed adaptive MASH2-0 gyroscope achieved an inherent system stability, better dynamic range and better noise performance when compared with a common 4th-order single loop EM-LAM gyroscope.

引用

页码：753 / 756

页数：4

共 17 条

[1] Multi stage noise shaping sigma-delta modulator (MASH) for capacitive MEMS accelerometers
Almutairi, Bader
Kraft, Michael
SENSORS AND ACTUATORS A-PHYSICAL, 2012, 186 : 169 - 177
[2] Multi Stage Noise Shaping Sigma-delta Modulator (MASH) for Capacitive MEMS Accelerometers
Almutairi, Bader
Kraft, Michael
EUROSENSORS XXV, 2011, 25
[3] Noyel wideband cascaded sigma-delta modulator with digital on-line calibration
Chiang, Jen-Shiun
Chang, Teng-Hung
Recent Advances in Circuits, Systems and Signal Processing, 2002, : 89 - 92
[4] A Noise-shaping SAR Assisted MASH 2-1 Sigma-Delta Modulator
Lin, Yu-Sian
Chang, Soon-Jyh
Wei, Chia-Ling
2020 INTERNATIONAL SYMPOSIUM ON VLSI DESIGN, AUTOMATION AND TEST (VLSI-DAT), 2020,
[5] Multi-bit Sigma-Delta TDC Architecture with Self-Calibration
Uemori, Satoshi
Ishii, Masamichi
Kobayashi, Haruo
Doi, Yuta
Kobayashi, Osamu
Matsuura, Tatsuji
Niitsu, Kiichi
Arakawa, Yuta
Hirabayashi, Daiki
Yano, Yuji
Gake, Tatsuhiro
Takai, Nobukazu
Yamaguchi, Takahiro J.
2012 IEEE ASIA PACIFIC CONFERENCE ON CIRCUITS AND SYSTEMS (APCCAS), 2012, : 671 - 674
[6] Experimental Study of Single Loop Sigma-Delta and Multi Stage Noise Shaping (MASH) Modulators for MEMS Accelerometer
Almutairi, Bader
Kraft, Michael
2011 IEEE SENSORS, 2011, : 520 - 523
[7] SELF-CALIBRATION TECHNIQUES FOR A 2ND-ORDER MULTIBIT SIGMA-DELTA MODULATOR
FATTARUSO, JW
KIRIAKI, S
DEWIT, M
WARWAR, G
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1993, 28 (12) : 1216 - 1223
[8] A novel noise-shaping DAC for multi-bit sigma-delta modulator
Chen, Jianzhong
Xu, Yong Ping
IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS II-EXPRESS BRIEFS, 2006, 53 (05) : 344 - 348
[9] On-line calibration and digital correction of multi-bit sigma-delta modulators
Fornasari, A
Borghetti, F
Malcovati, P
Maloberti, F
2005 Symposium on VLSI Circuits, Digest of Technical Papers, 2005, : 184 - 187
[10] A 20-MHz BW MASH Sigma-Delta Modulator with Mismatch Noise Randomization for Multi-Bit DACs
Di, Li
Fei, Chunlong
Zhang, Qidong
li, Yani
Yang, Yintang
JOURNAL OF CIRCUITS SYSTEMS AND COMPUTERS, 2020, 29 (07)

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