Preparation and tribological investigation of rare earth nanofilm on single-crystal silicon substrate

被引：0
|
作者：
Wang, L
Cheng, XH [1 ]
机构：
[1] Shanghai Jiao Tong Univ, Sch Mech & Power Engn, Shanghai 200030, Peoples R China
[2] Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
来源：
JOURNAL OF RARE EARTHS | 2006年 / 24卷 / 01期
关键词：
nanofilm; tnibological properties; MEMS; single-crystal silicon; rare earths;
D O I：
暂无
中图分类号：
O69 [应用化学];
学科分类号：
081704 ;
摘要：
The self-assembled method was introduced to successfully obtain rare earth(RE) nanofilm on a single-crystal silicon substrate. The resultant film was characterized by means of X-ray photoelectron spectroscopy (XPS), ellipsometer, contact angle meter and atomic force microscopy (AFM). The scratch experiment was performed for interfacial adhesion measurement of the RE film. The friction and wear behavior of RE nanofilm was examined on a DF-PM reciprocating friction and wear tester. The results indicate the RE nanofilin is of low coefficient of friction (COF) and high wear resistance. These desirable characteristics of RE nanofilm together with its nanometer thickness, strong bonding to the substrate and low surface energy make it a promising choice as a solid lubricant film in micro electromechanical system (MEMS) devices.
引用
收藏
页码：44 / 49
页数：6
相关论文
共 50 条
  • [1] Preparation and Tribological Investigation of Rare Earth Nanofilm on Single-Crystal Silicon Substrate
    王梁
    程先华
    Journal of Rare Earths, 2006, (01) : 44 - 49
  • [2] SINGLE-CRYSTAL PREPARATION OF CUBIC RARE EARTH TUNGSTEN BRONZES
    COLLINS, CV
    OSTERTAG, W
    JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1966, 88 (13) : 3171 - &
  • [3] Effect of rare-earth impurities on the magnetoresistance of single-crystal silicon
    Brinkevich, DI
    Lukashevich, MG
    Prosolovich, VS
    Skripka, DA
    Yankovskii, YN
    INORGANIC MATERIALS, 2002, 38 (07) : 637 - 639
  • [4] Effect of Rare-Earth Impurities on the Magnetoresistance of Single-Crystal Silicon
    D. I. Brinkevich
    M. G. Lukashevich
    V. S. Prosolovich
    D. A. Skripka
    Yu. N. Yankovskii
    Inorganic Materials, 2002, 38 : 637 - 639
  • [5] Tribological behavior of polycrystalline and single-crystal silicon
    Gardos, M. N.
    TRIBOLOGY LETTERS, 1996, 2 (04) : 355 - 373
  • [6] SINGLE-CRYSTAL SILICON ON SAPPHIRE SUBSTRATE
    MANASEVIT, HM
    SIMPSON, WI
    JOURNAL OF APPLIED PHYSICS, 1964, 35 (04) : 1349 - &
  • [7] PREPARATION OF SINGLE-CRYSTAL SILICON PHOSPHIDE
    UGAI, YA
    SOKOLOV, LI
    GONCHAROV, EG
    LUKIN, AN
    INORGANIC MATERIALS, 1981, 17 (07) : 851 - 852
  • [8] X-Ray single-crystal investigation of rare earth osmium silicides
    Rizzoli, C
    Salamakha, PS
    Sologub, OL
    Belletti, D
    Gonçalves, AP
    Almeida, M
    JOURNAL OF ALLOYS AND COMPOUNDS, 2004, 363 (1-2) : 217 - 222
  • [9] PREPARATION OF A NITRIDE FILM ON A SILICON SINGLE-CRYSTAL
    KUTSIYA, NM
    SHVANGIRADZE, RR
    INORGANIC MATERIALS, 1991, 27 (04) : 709 - 710
  • [10] Tribological behavior and phase transformation of single-crystal silicon in air
    Li, Xiaocheng
    Lu, Jinjun
    Liu, Bin
    Yang, Shengrong
    TRIBOLOGY INTERNATIONAL, 2008, 41 (03) : 189 - 194
12345