MEMS technology for nanobio research

Micro- and nanotechnology have gathered 20 years of increasing research efforts. This research activity began and developed with the design and the fabrication of micro- and nanomechanisms, sensors and actuators, which range from 10 nm to 100 mu m. More recent trends focus on the transfer of this technology know-how towards nanobiological topics and very wide range applications can be addressed. Among them, this review proposes various examples that include MEMS tweezers for molecular direct handling and characterization, single molecular characterization in femto-L chambers and dynamic microarray for cell positioning. The micromachined devices are described with bio-oriented experiences that are relevant to foresee their future contribution to drug discovery.