Fabrication of a single-crystal Bragg mirror for solidly-mounted resonators and transducers

被引：0
|
作者：
Baron, Thomas [1 ]
Lebrasseur, Eric [1 ]
Alzuaga, Sebastien [1 ]
Wang, Haixia [1 ]
Bassignot, Florent [1 ]
Boy, Jean-Jacques [1 ]
Ballandras, S. [1 ]
Couteleau, Laurent
机构：
[1] Univ Franche Comte, FEMTO ST, CNRS, ENSMM,UTBM, F-25030 Besancon, France
来源：
2012 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2012年
关键词：
BAW; Bragg mirror; Quartz resonator; acoustic waves;
D O I：
10.1109/ULTSYM.2012.0135
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this work, we propose a Bragg mirror for Quartz resonator at 10MHz. Two processes based on bonding and thinning wafers is proposed. A stack of ten bonding and thinning wafers is realized. Ultrasonic characterization shows the behavior of the Bragg mirror and the evolution versus the number of layer stack. Resonators on such Bragg mirror show less spurious signal but need improvement about quality factor of resonator.
引用
收藏
页码：543 / 546
页数：4
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