REPLICATION OF NANO/MICRO QUARTZ MOLD BY HOT EMBOSSING AND ITS APPLICATION TO BOROSILICATE GLASS EMBOSSING

被引：1
|
作者：
Youn, Sung-Won [1 ]
Okuyama, Chieko [1 ]
Takahashi, Masharu [1 ]
Maeda, Ryutaro [1 ]
机构：
[1] Natl Inst Adv Ind Sci & Technol, AMRI, Tsukuba, Ibaraki, Japan
来源：
INTERNATIONAL JOURNAL OF MODERN PHYSICS B | 2008年 / 22卷 / 31-32期
关键词：
Hot embossing; glass-to-glass embossing; glassy carbon; quartz glass; borosilicate glass; focused ion beam; dicing;
D O I：
10.1142/S0217979208051674
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Glass hot-embossing is one of essential techniques for the development of high-performance optical, bio, and chemical micro electromechanical system (MEMS) devices. This method is convenient, does not require routine access to clean rooms and photolithographic equipment, and can be used to produce multiple copies of a quartz mold as well as a MEMS component. In this study, quartz molds were prepared by hot-embossing with the glassy carbon (GC) masters, and they were applied to the hot-emboss of borosilicate glasses. The GC masters were prepared by dicing and focused ion beam (FIB) milling techniques. Additionally, the surfaces of the embossed quartz molds were coated with molybdenum barrier layers before embossing borosilicate glasses. As a result, micro-hot-embossed structures could be developed in borosilicate glasses with high fidelity by hot embossing with quartz molds.
引用
收藏
页码：6118 / 6123
页数：6
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