Zinc Oxide Grown by ALD from Heavily n-type to p-type Material

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作者：
Guziewicz, Elzbieta [1 ]
Przezdziecka, Ewa [1 ]
Krajewski, Tomasz A. [1 ]
机构：
[1] Polish Acad Sci, Inst Phys, Aleja Lotnikow 32-46, PL-02668 Warsaw, Poland
来源：
2019 COMPOUND SEMICONDUCTOR WEEK (CSW) | 2019年
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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