High-adhesion Cu patterns fabricated by nanosecond laser modification and electroless copper plating

被引:21
|
作者
Lv, Ming
Liu, Jianguo [1 ]
Zeng, Xiaoyan
Du, Qifeng
Ai, Jun
机构
[1] Huazhong Univ Sci & Technol, Wuhan Natl Lab Optoelect, Wuhan 430074, Peoples R China
基金
中国国家自然科学基金;
关键词
High adhesion strength; Selective metallization; Nanosecond laser modification; Electroless copper plating; FEMTOSECOND LASER; THIN-FILM; ACTIVATION; METALLIZATION; INSULATORS;
D O I
10.1016/j.apsusc.2015.07.046
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Adhesion strength is a crucial factor for the performance and reliability of metallic patterns on insulator substrates. In this study, we present an efficient technique for selective metallization of alumina ceramic with high adhesion strength by using nanosecond laser modification and electroless copper plating. Specifically, a 355 nm Nd:YVO4 ultraviolet (UV) laser was employed not only to decompose palladium chloride film locally for catalyzing the electroless reaction, but also to modify the ceramic surface directly using its high fluence. An orthogonal experiment was undertaken to study the effects of processing parameters including laser fluence, scanning speed and scanning line interval on adhesion strength. The adhesion strength was measured by pulling a metallic wire soldered into the copper coating perpendicular to the substrate using a pull tester. The results have shown that a strong adhesion between the copper coating and the alumina ceramic, higher than the tensile strength of tin-lead solder was obtained. Surface and interface characteristics were investigated to understand that, whose results have shown that the high-aspect-ratio microstructures formed by the laser modification is the major reason for the improvement of adhesion. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码:1150 / 1155
页数:6
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