Recent results on longlife 1kHz excimer laser development

被引：0
|
作者：
Rebhan, U [1 ]
Bragin, I [1 ]
Voss, F [1 ]
Stamm, U [1 ]
机构：
[1] LAMBDA PHYS GMBH,D-37039 GOTTINGEN,GERMANY
来源：
GAS AND CHEMICAL LASERS | 1996年 / 2702卷
关键词：
excimer lasers; high repetition rate laser; 1 kHz laser; pulse energy stability;
D O I：
10.1117/12.236881
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：284 / 288
页数：5
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