Chemically-Etched Ultra-High-Q Micro-Cavities on a Silicon Chip

被引：0
|
作者：
Chen, Tong [1 ]
Lee, Hansuek [1 ]
Li, Jiang [1 ]
Vahala, Kerry [1 ]
机构：
[1] CALTECH, Thomas J Watson Sr Lab Appl Phys, Pasadena, CA 91125 USA
来源：
2012 IEEE PHOTONICS CONFERENCE (IPC) | 2012年
关键词：
optical resonators; silicon-chip-based devices; OPTICAL MICROCAVITIES; MICRORESONATOR;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Optical resonators with quality factor as high as 875 million are demonstrated. These silicon-chip-based devices are fabricated using only lithography and chemical etching, thereby expanding integration opportunities and possible applications.
引用
收藏
页码：262 / 263
页数：2
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