Batch wet process still dominates wafer-cleaning market - But for how long?

被引：0
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作者：
Moslehi, B [1 ]
机构：
[1] Noblemen Grp, San Diego, CA USA
[2] Noblemen Grp, Silicon Valley, CA USA
[3] Noblemen Grp, Seoul, South Korea
[4] Noblemen Grp, Portland, OR USA
来源：
MICRO | 2004年 / 22卷 / 03期
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：58 / +
页数：2
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