Self-assembled carbon-induced germanium quantum dots studied by grazing-incidence small-angle x-ray scattering

被引：40
|
作者：
Stangl, J
Holy, V
Mikulik, P [1 ]
Bauer, G
Kegel, I
Metzger, TH
Schmidt, OG
Lange, C
Eberl, K
机构：
[1] Johannes Kepler Univ Linz, Inst Semicond Phys, A-4040 Linz, Austria
[2] Univ Munich, Sekt Phys, D-80539 Munich, Germany
[3] Max Planck Inst Festkorperforsch, D-70569 Stuttgart, Germany
[4] Masaryk Univ, Lab Thin Films & Nanostruct, CS-61137 Brno, Czech Republic
来源：
APPLIED PHYSICS LETTERS | 1999年 / 74卷 / 25期
关键词：
D O I：
10.1063/1.124179
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We present a structural investigation of buried C-induced Ge quantum dot multilayers grown on (001) Si by molecular-beam epitaxy. Using grazing-incidence small angle x-ray scattering, we determine the shape, the mean radius, height, and dot distance. The dot distribution is isotropic within the (001) interfaces, and no correlation of the dot positions along growth direction was found. (C) 1999 American Institute of Physics. [S0003-6951(99)00825-6].
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收藏
页码：3785 / 3787
页数：3
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