Refractive Index Measurement in TCO Layers for Micro Optoelectronic Devices

The operation of micro-optoelectronic devices relies on optical properties of materials, first of all the wavelength dependent refractive index. Standard measurement techniques are often prone to significant ambiguities caused by the periodic nature of the optical response. In this paper we propose a procedure which exploits transmittance measurements, performed at variable light incidence angle, to reconstruct the complex refractive index as a function of the wavelength. Experiments performed on a thin TCO layer prove the reliability of the method.