Influence of rinsing temperature on properties of ZnO thin films prepared by SILAR method with propylene glycol

被引:11
|
作者
Shei, S. C. [1 ]
Lee, P. Y. [2 ,3 ]
机构
[1] Natl Univ Tainan, Dept Elect Engn, Tainan 700, Taiwan
[2] Natl Cheng Kung Univ, Dept Elect Engn, Tainan 701, Taiwan
[3] Natl Cheng Kung Univ, Inst Microelect, Tainan 701, Taiwan
关键词
Propylene glycol; Rinsing temperature; ZnO thin films; SILAR; ZINC-OXIDE FILMS; OPTICAL-PROPERTIES; HYDROGEN-BOND; DEPOSITION; PHOTOLUMINESCENCE; LAYER;
D O I
10.1016/j.jallcom.2012.07.149
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
This study investigated the influence of deposition temperature on the growth as well as the structural and optical properties of ZnO thin films on a glass substrate. The thin films were produced using the successive ionic layer adsorption and reaction (SILAR) technique with propylene glycol. Our results reveal the formation of highly c-axis oriented ZnO thin films at temperatures exceeding 125 degrees C. Increasing the temperature of the propylene glycol enhanced the crystallinity and surface smoothness of the film considerably. Moreover, with an increase in rinsing temperature, the optical transmittance spectra of ZnO thin films was as high as 95% in the visible-light region, with a notable decrease in the occurrence of oxygen defects. Results indicate that higher rinsing temperatures can enhance the process of hydrolyzing Zn(OH)(2) and improve the quality of films. In addition, the crystallinity of ZnO films can be enhanced by post-annealing treatment. Crown Copyright (C) 2012 Published by Elsevier B.V. All rights reserved.
引用
收藏
页码:165 / 170
页数:6
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